Title:
切削方法
Document Type and Number:
Japanese Patent JP4243364
Kind Code:
B2
More Like This:
Inventors:
Shinichi Namioka
Shigeru Ishii
Shigeru Ishii
Application Number:
JP7533598A
Publication Date:
March 25, 2009
Filing Date:
March 24, 1998
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q11/00; B24B55/06; B28D7/02; H01L21/301
Domestic Patent References:
| JP9069499A | ||||
| JP3126054U | ||||
| JP4025242U | ||||
| JP55155325A | ||||
| JP64080506A | ||||
| JP5080512U | ||||
| JP6097278A | ||||
| JP5090403A | ||||
| JP3250644A |
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Kyoko Kawamura