Title:
ヘテロ電界効果トランジスタ、およびその製造方法、ならびにそれを備えた送受信装置
Document Type and Number:
Japanese Patent JP4243593
Kind Code:
B2
Inventors:
Nobuyuki Otsuka
Koichi Mizuno
Shigeo Yoshii
Suzuki Asamiyoshi
Koichi Mizuno
Shigeo Yoshii
Suzuki Asamiyoshi
Application Number:
JP2005013136A
Publication Date:
March 25, 2009
Filing Date:
January 20, 2005
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/205; H01L21/338; H01L29/778; H01L29/812
Domestic Patent References:
| JP2000091559A | ||||
| JP2000164852A | ||||
| JP2002094187A | ||||
| JP2000216101A |
Attorney, Agent or Firm:
Yoshihiro Tsunoda
Yasu Furukawa
Toshio Nishitani
Keiji width
Izumi Uchiyama
Yosuke Koreeda
Yasu Furukawa
Toshio Nishitani
Keiji width
Izumi Uchiyama
Yosuke Koreeda