Title:
ポジ型感光性樹脂組成物
Document Type and Number:
Japanese Patent JP4244463
Kind Code:
B2
Inventors:
Nakajima Michio
Saito Hideki
Saito Hideki
Application Number:
JP27139599A
Publication Date:
March 25, 2009
Filing Date:
September 24, 1999
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
G03F7/022; H01L21/027; C08G73/06; G03F7/004; G03F7/023; G03F7/037
Domestic Patent References:
| JP1046862A | ||||
| JP5197153A | ||||
| JP64006947A | ||||
| JP10022281A |