Title:
ガス処理装置およびそれに用いられる原料供給系のパージ機構
Document Type and Number:
Japanese Patent JP4252142
Kind Code:
B2
Inventors:
Besan banson
Kenichi Kubo
Kyoko Ikeda
Hideki Yoshikawa
Kenichi Kubo
Kyoko Ikeda
Hideki Yoshikawa
Application Number:
JP483399A
Publication Date:
April 08, 2009
Filing Date:
January 12, 1999
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/44; C23C16/455; H01L21/285
Domestic Patent References:
| JP10147870A | ||||
| JP3004928A | ||||
| JP64000268A |
Attorney, Agent or Firm:
Hiroshi Takayama