Title:
真空適合性のある直線運動装置
Document Type and Number:
Japanese Patent JP4257871
Kind Code:
B2
Abstract:
A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.
Inventors:
ヴェネクラーセン，リー
トロスト，ディヴィッド
トロスト，ディヴィッド
Application Number:
JP52679998A
Publication Date:
April 22, 2009
Filing Date:
December 10, 1997
Export Citation:
Assignee:
アプライド マテリアルズ，インコーポレーテッド
International Classes:
F16C32/06; F16C29/00; F16C29/02; G03F7/20; H01J37/20; H01J37/305; H01L21/027
Attorney, Agent or Firm:
内原 晋
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