Title:
ヒドロキシプロピルセルロースのアリールウレタン類を含む熱硬化性の反射防止コーティング
Document Type and Number:
Japanese Patent JP4259871
Kind Code:
B2
Abstract:
New polymers and anti-reflective compositions including those polymers are provided. The polymer comprises recurring monomers according to the formulawherein each R is -OH, -CH2OH, -O-R1-O-X, or -CH2-O-R1-O-X, each R1 is a branched or unbranched alkyl group, and each X is shown below. The inventive compositions can be used to form anti-reflective coatings having high etch rate and optical densities.
Inventors:
Meadle Jimmy Dee.
Bhubah Mandal Earl.
Bhubah Mandal Earl.
Application Number:
JP2002570012A
Publication Date:
April 30, 2009
Filing Date:
February 22, 2002
Export Citation:
Assignee:
Brewer Science INC.
International Classes:
C08B11/15; C08G18/64; G03F7/11; C08G18/71; C09D101/14; C09D175/04; G02B1/11; G03F7/09; H01L21/027
Domestic Patent References:
| JP2002513172A | ||||
| JP10025365A | ||||
| JP57158644A | ||||
| JP63156538A | ||||
| JP2001518952A |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Haruko Sanwa
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