Title:
シール部材及びプラズマ処理装置
Document Type and Number:
Japanese Patent JP4268798
Kind Code:
B2
Inventors:
Teruki Iwashita
Application Number:
JP2002350279A
Publication Date:
May 27, 2009
Filing Date:
December 02, 2002
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/31; H05H1/46; B01J19/08; C23C16/44; C23C16/50; F16J15/12; H01L21/3065
Domestic Patent References:
| JP5517705A | ||||
| JP5339736A | ||||
| JP58199529A | ||||
| JP2000106298A | ||||
| JP11131052A | ||||
| JP2002126675A | ||||
| JP200253986A | ||||
| JP2003343727A | ||||
| JP7317908A | ||||
| JP7201828A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yuichi Yamada
Yasuhito Suzuki
Yoshiki Kuroki
Yuichi Yamada
Yasuhito Suzuki