イオン源の為の間接加熱ボタン型カソード

Title:

イオン源の為の間接加熱ボタン型カソード

Document Type and Number:

Japanese Patent JP4271584

Kind Code:

B2

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Inventors:

Farley, Marvin
Takase, Takao
Sugar, shu
Riding, joffrey
Rose, peter
Christow, Christos

Application Number:

JP2003573666A

Publication Date:

June 03, 2009

Filing Date:

February 20, 2003

Export Citation:

Assignee:

APPLIED MATERIALS,INCORPORATED

International Classes:

H01J27/02; H01J27/04; H01J27/08; H01J37/00; H01J37/08; H01J37/317

Domestic Patent References:

JP7262946A
JP10199430A

Foreign References:

US5374828

Attorney, Agent or Firm:

Yoshiki Hasegawa
Tosuke Yosuke
Yuichi Yamada

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