半導体圧力センサの製造方法 - 株式会社デンソー

Title:

半導体圧力センサの製造方法

Document Type and Number:

Japanese Patent JP4273663

Kind Code:

B2

Inventors:

Kenichi Yokoyama
Akira Tai
Eiji Kawasaki
Masakazu Terada

Application Number:

JP2001004030A

Publication Date:

June 03, 2009

Filing Date:

January 11, 2001

Export Citation:

Assignee:

株式会社デンソー

International Classes:

G01L9/04; H01L29/84; G01L9/00; H01L21/02; H01L21/20

Domestic Patent References:

JP2000171318A

Attorney, Agent or Firm:

Yoji Ito
Takahiro Miura
Fumihiro Mizuno

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