Title:
スパッタ源及び成膜装置
Document Type and Number:
Japanese Patent JP4274452
Kind Code:
B2
Inventors:
Shunji Kuroiwa
Kamo Katsuhisa
Kamo Katsuhisa
Application Number:
JP2001098963A
Publication Date:
June 10, 2009
Filing Date:
March 30, 2001
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
C23C14/35; G11B7/26
Domestic Patent References:
| JP6240453A | ||||
| JP11140639A | ||||
| JP4183857A |
Attorney, Agent or Firm:
Masahiko Hinataji
Mitsuyuki Matsuyama
Mitsuyuki Matsuyama