Title:
感光性ポリマーおよびこれを含有する化学増幅型レジスト組成物
Document Type and Number:
Japanese Patent JP4276776
Kind Code:
B2
Abstract:
A photosensitive copolymer has a weight-average molecular weight of 3,000 to 100,000 and is represented by the following formula: wherein R1 is a hydrogen atom or methyl, R2 is an acid-labile tertiary alkyl group, and m/(m+n) is 0.5 to 0.8.
Inventors:
Cui Ai Shun
Kim wise friend
Common sense
Fumi Zhou
Kim wise friend
Common sense
Fumi Zhou
Application Number:
JP2000354974A
Publication Date:
June 10, 2009
Filing Date:
November 21, 2000
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
G03F7/039; C08F220/18; C08F222/06; C08K5/00; C08L33/06; C08L35/00; G03F7/004; H01L21/027
Domestic Patent References:
| JP10301286A | ||||
| JP11295892A | ||||
| JP11305444A | ||||
| JP11218927A | ||||
| JP5080516A | ||||
| JP5011457A | ||||
| JP10505173A |
Attorney, Agent or Firm:
Mikio Hatta
Atsushi Nogami
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Atsushi Nogami
Yasuo Nara
Etsuko Saito
Katsuyuki Utani