Title:
加速度センサの製造方法
Document Type and Number:
Japanese Patent JP4277343
Kind Code:
B2
Inventors:
Sumio Akai
Hiroshi Saito
Hiroshi Saito
Application Number:
JP4558999A
Publication Date:
June 10, 2009
Filing Date:
February 23, 1999
Export Citation:
Assignee:
Panasonic Electric Works Co., Ltd.
International Classes:
G01P15/12; H01L29/84; H01L21/301
Domestic Patent References:
| JP7260821A | ||||
| JP10312987A | ||||
| JP7294548A | ||||
| JP7273351A |
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori