光学プローブ

Title:

光学プローブ

Document Type and Number:

Japanese Patent JP4280599

Kind Code:

B2

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Inventors:

Yuichi Miyoshi
Yoshihiko Kikuchi
Tokito Shinya

Application Number:

JP2003359744A

Publication Date:

June 17, 2009

Filing Date:

October 20, 2003

Export Citation:

Assignee:

Canon Inc
Canon Chemicals Inc.

International Classes:

G01N21/64

Domestic Patent References:

Attorney, Agent or Firm:

Yasuhiko Hibiya

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