Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4283360
Kind Code:
B2
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Inventors:
Sunil Wickrumanayaka
Application Number:
JP36464198A
Publication Date:
June 24, 2009
Filing Date:
December 22, 1998
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01L21/205; H01L21/302; H01L21/3065; H05H1/46
Domestic Patent References:
| JP6316779A | ||||
| JP62286227A | ||||
| JP9199478A |
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi