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Patent Searching and Data


Title:
化学増幅型ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4289121
Kind Code:
B2
Inventors:
高田 佳幸
李 榮濬
落合 鋼志郎
Application Number:
JP2003367050A
Publication Date:
July 01, 2009
Filing Date:
October 28, 2003
Export Citation:
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Assignee:
住友化学株式会社
International Classes:
C08F220/28; G03F7/004; C08F20/28; C08F222/04; C08F232/00; G03F7/039
Domestic Patent References:
JP2003241379A
JP2003330172A
JP2003330194A
Attorney, Agent or Firm:
中山 亨