Title:
ポリッシング装置の回転駆動装置
Document Type and Number:
Japanese Patent JP4294228
Kind Code:
B2
Abstract:
A polishing device having a table connected to a traction drive type reduction gear. The reduction gear includes an externally contacting shaft formed in a ring-shaped hollow cylinder and arranged at the center; a plurality of intermediate shafts which are equidistantly disposed at the circumference of the externally contacting shaft, at least one of which is an input shaft; and an internally contacting cylinder with which the intermediate shafts internally contact, and under free conditions, the externally contacting shaft formed in a hollow cylinder has a diameter which is a little bit larger than a diameter of an imaginary circle which externally contacts with a plurality of intermediate shafts whereby pressing load is created by means of deformation of the hollow cylinder.
Inventors:
Hiroo Wang
Kawashima Koji
Kawashima Koji
Application Number:
JP2001036083A
Publication Date:
July 08, 2009
Filing Date:
February 13, 2001
Export Citation:
Assignee:
Nabtesco Co., Ltd.
International Classes:
B24B47/12; B24B41/04; B24B41/047; F16H13/02; F16H13/08; H01L21/304
Domestic Patent References:
| JP11048139A | ||||
| JP63189568U | ||||
| JP5157149A |
Attorney, Agent or Firm:
Eiji Sannaka
Motokatsu Sannaka
Motokatsu Sannaka