Title:
ポジ型レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4296448
Kind Code:
B2
Inventors:
Keio Tanaka
Akihiro Seki
Katsuya Takemura
Tsunehiro Nishi
Akihiro Seki
Katsuya Takemura
Tsunehiro Nishi
Application Number:
JP2006315413A
Publication Date:
July 15, 2009
Filing Date:
November 22, 2006
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/039; C08F220/28; G03F7/004; H01L21/027
Domestic Patent References:
| JP2008031298A | ||||
| JP2008129388A | ||||
| JP2007145797A | ||||
| JP2006301435A |
Foreign References:
| EP1710230A1 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
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