Title:
静電容量型圧力センサおよびその製造方法並びに静電容量型圧力センサに用いるセンサ用構造体
Document Type and Number:
Japanese Patent JP4296728
Kind Code:
B2
Abstract:
An opening portion (11) penetrates a substrate (10) from its first to a second surface. At least one window portion (31) penetrates a lower electrode (30) from the side of the substrate to the side of a cavity portion (61), connecting the cavity and opening portions. A cover member covers the window portion, separates the cavity portion from outside, and forms a reference pressure chamber in the cavity portion. An Independent claim is also included for a method for manufacturing an electrical capacitance pressure sensor.
Inventors:
Yasutoshi Suzuki
Seiichiro Ishio
Tetsuo Fujii
Keiichi Shimaoka
Hirofumi Funabashi
Seiichiro Ishio
Tetsuo Fujii
Keiichi Shimaoka
Hirofumi Funabashi
Application Number:
JP2001206688A
Publication Date:
July 15, 2009
Filing Date:
July 06, 2001
Export Citation:
Assignee:
株式会社デンソー
株式会社豊田中央研究所
株式会社豊田中央研究所
International Classes:
G01L9/12; G01L9/00; G01L13/06; H01L29/84
Domestic Patent References:
| JP8247878A | ||||
| JP2000214035A | ||||
| JP2000022172A | ||||
| JP63025982A |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Fumihiro Mizuno
Takahiro Miura
Fumihiro Mizuno