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Patent Searching and Data


Title:
ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4300774
Kind Code:
B2
Inventors:
宮 芳子
上谷 保則
山口 訓史
吉田 勲
Application Number:
JP2002258585A
Publication Date:
July 22, 2009
Filing Date:
September 04, 2002
Export Citation:
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Assignee:
住友化学株式会社
International Classes:
G03F7/039; C08F8/00; C08F232/00; C08F232/08; C08K5/36; C08L45/00; G03F7/004; H01L21/027
Domestic Patent References:
JP2002145962A
JP2002072484A
JP2002338634A
JP2003162062A
JP2003084439A
JP2001233917A
JP2001147534A
Foreign References:
WO2003025676A1
WO2003006413A1
Attorney, Agent or Firm:
中山 亨