Title:
歪検出装置
Document Type and Number:
Japanese Patent JP4305992
Kind Code:
B2
Inventors:
Yukio Mizukami
Toshiro Otobe
Takashi Kawai
Mayumi Inada
Toshiro Otobe
Takashi Kawai
Mayumi Inada
Application Number:
JP3668099A
Publication Date:
July 29, 2009
Filing Date:
February 16, 1999
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G01L1/00; G01L1/22; G01B7/16
Domestic Patent References:
| JP9304197A | ||||
| JP8304200A | ||||
| JP9162421A | ||||
| JP63037227A | ||||
| JP98324A |
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano
Hiroki Naito
Daisuke Nagano