Title:
静電チャックユニット
Document Type and Number:
Japanese Patent JP4306080
Kind Code:
B2
More Like This:
Inventors:
Hiroaki Hori
Application Number:
JP2000057766A
Publication Date:
July 29, 2009
Filing Date:
March 02, 2000
Export Citation:
Assignee:
TOTO Ltd.
International Classes:
H01L21/683; H01L21/68
Domestic Patent References:
| JP2160444A | ||||
| JP9260472A | ||||
| JP11163110A | ||||
| JP9213773A | ||||
| JP11031736A |
Attorney, Agent or Firm:
Yu Koyama