Title:
フォトマスク検査方法、フォトマスク検査装置及びフォトマスク製造方法
Document Type and Number:
Japanese Patent JP4309752
Kind Code:
B2
Inventors:
Katsuki Ohashi
Hiroshi Inoue
Akira Ono
Hiroshi Inoue
Akira Ono
Application Number:
JP2003409608A
Publication Date:
August 05, 2009
Filing Date:
December 08, 2003
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01B11/30; G01N21/956; G03F1/72; G03F1/84
Domestic Patent References:
| JP2004157548A | ||||
| JP6294750A | ||||
| JP63173322A | ||||
| JP8292159A | ||||
| JP1114035A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto