電子ビーム検査装置 - NIKON CORPORATION

Title:

電子ビーム検査装置

Document Type and Number:

Japanese Patent JP4310824

Kind Code:

B2

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Inventors:

Takemoto Shigeru

Application Number:

JP28239498A

Publication Date:

August 12, 2009

Filing Date:

October 05, 1998

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

H01J37/244; H01J37/29

Domestic Patent References:

Attorney, Agent or Firm:

Furuya Fumio
Eisuke Suzuki

Previous Patent: JPS4310823

Next Patent: JPS4310825