Title:
エピタキシャル成長方法
Document Type and Number:
Japanese Patent JP4319723
Kind Code:
B2
Inventors:
Seiichi Takahashi
Shin Asari
Tetsuo Mitsuhashi
Hideo Yamagata
Takemoto Kawamoto
Shin Asari
Tetsuo Mitsuhashi
Hideo Yamagata
Takemoto Kawamoto
Application Number:
JP1542099A
Publication Date:
August 26, 2009
Filing Date:
January 25, 1999
Export Citation:
Assignee:
株式会社アルバック
ソニー株式会社
ソニー株式会社
International Classes:
H01L21/205; H01L21/677; H01L21/68
Domestic Patent References:
| JP7029963A | ||||
| JP10050802A | ||||
| JP10168571A | ||||
| JP6002681U | ||||
| JP7297257A | ||||
| JP5218176A | ||||
| JP4329630A | ||||
| JP5291158A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe