Title:
石英ガラス円筒体の内面研磨装置
Document Type and Number:
Japanese Patent JP4319725
Kind Code:
B2
Inventors:
Akihiko Sugama
Toru Mizuno
Toru Mizuno
Application Number:
JP3879299A
Publication Date:
August 26, 2009
Filing Date:
February 17, 1999
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
Atoc Co., Ltd.
Atoc Co., Ltd.
International Classes:
B24B5/40; C03B20/00; B24B29/00; C03B37/012; H01L21/22
Domestic Patent References:
| JP5269654A | ||||
| JP4210366A | ||||
| JP60251141A |
Attorney, Agent or Firm:
Shoji Ishihara
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