Title:
CVDチャンバーのクリーニング方法およびそれに用いるクリーニングガス
Document Type and Number:
Japanese Patent JP4320389
Kind Code:
B2
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Inventors:
Yonemura Taisuke
Mitsui Yuki
Sekiya Akira
Mitsui Yuki
Sekiya Akira
Application Number:
JP2003054284A
Publication Date:
August 26, 2009
Filing Date:
February 28, 2003
Export Citation:
Assignee:
Kanto Denka Kogyo Co., Ltd.
Asahi Glass Co., Ltd.
Canon ANELVA Corporation
Toshiba Corporation
Hitachi Kokusai Electric Co., Ltd.
ULVAC, Inc.
National Institute of Advanced Industrial Science and Technology
Asahi Glass Co., Ltd.
Canon ANELVA Corporation
Toshiba Corporation
Hitachi Kokusai Electric Co., Ltd.
ULVAC, Inc.
National Institute of Advanced Industrial Science and Technology
International Classes:
C23C16/44; H01L21/31; H01L21/3065
Domestic Patent References:
JP2004511088A | ||||
JP2002280376A | ||||
JP2001274102A |
Attorney, Agent or Firm:
Shunichiro Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki
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