Title:
多層膜反射鏡の製造方法
Document Type and Number:
Japanese Patent JP4320578
Kind Code:
B2
Inventors:
Katsuhiko Murakami
Application Number:
JP2003334852A
Publication Date:
August 26, 2009
Filing Date:
September 26, 2003
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G21K1/06; G03F7/20; G21K5/02; H01L21/027
Domestic Patent References:
| JP2003227898A | ||||
| JP2003080066A | ||||
| JP9230098A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi