Title:
ポジ型電子線、X線又はEUV光用レジスト組成物及びそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4324437
Kind Code:
B2
Inventors:
Kazuyoshi Mizutani
Shoichiro Anami
Yutaka Adegawa
Shoichiro Anami
Yutaka Adegawa
Application Number:
JP2003334831A
Publication Date:
September 02, 2009
Filing Date:
September 26, 2003
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; H01L21/027
Domestic Patent References:
| JP2001281849A | ||||
| JP2000066404A | ||||
| JP2003177537A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa