Title:
ロードロック制御用の差圧・絶対圧変換器
Document Type and Number:
Japanese Patent JP4327423
Kind Code:
B2
Inventors:
Youfang
Garry Holcomb
Ol bensel
Garry Holcomb
Ol bensel
Application Number:
JP2002228745A
Publication Date:
September 09, 2009
Filing Date:
August 06, 2002
Export Citation:
Assignee:
MKS Instruments Incorporated
International Classes:
G01L11/00; G01L13/06; C23C14/56; C23C16/44; G01L21/12; H01L29/84
Domestic Patent References:
| JP2000181548A | ||||
| JP2001066209A | ||||
| JP6158284A | ||||
| JP6079159A | ||||
| JP5283367A | ||||
| JP2002126504A |
Foreign References:
| US20030010129 | ||||
| US20050114070 |
Attorney, Agent or Firm:
Takashi Ishida
Jun Tsuruta
Masaya Nishiyama
Higuchi Souji
Jun Tsuruta
Masaya Nishiyama
Higuchi Souji