To provide a zinc oxide thin film manufactured without using an expensive substrate, unnecessary for the control of the cut angle of a substrate, formed at reduced production cost and having higher electromechanical coupling factor and high performance as compared with a conventional zinc oxide thin film, and to provide a surface acoustic wave device using the same.

The zinc oxide thin film is formed on a quartz substrate to have ≥4 μm thickness. The zinc oxide thin film exhibits c-axial orientation mainly in the substrate side and a-axial orientation in the surface side to have piezoelectric property. The electromechanical coupling factor is improved by showing the a-axial orientation in the surface side and the zinc oxide thin film is structured at low cost by forming on the quartz substrate.

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