Title:
露光装置及び露光装置の製造方法
Document Type and Number:
Japanese Patent JP4342444
Kind Code:
B2
Abstract:
The invention is directed to the provision of an exposure apparatus in which is stored an electric current value appropriately determined for supply to a light-emitting device, and a method for producing such an exposure apparatus. The production method according to the invention comprises the steps of supplying a reference electric current to the light-emitting device, and measuring the amount of light from each of the plurality of pixels of the light modulating device, determining whether a minimum value among the amounts of light measured from the plurality of pixels lies within a predetermined range, and determining the value of the electric current to be supplied to the light-emitting device so that the minimum value of the amounts of light falls within the predetermined range when the minimum value of the amounts of light is outside the predetermined range.
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Inventors:
Satoshi Shioda
Makoto Yasunaga
Sadao Masubuchi
Akira Iwako Exhibition
Masashi Yokoyama
Makoto Yasunaga
Sadao Masubuchi
Akira Iwako Exhibition
Masashi Yokoyama
Application Number:
JP2004542877A
Publication Date:
October 14, 2009
Filing Date:
October 10, 2003
Export Citation:
Assignee:
Citizen Holdings Co., Ltd.
International Classes:
B41J2/445; B41J2/45; G06K15/12
Domestic Patent References:
JP2001138568A | ||||
JP2002059584A | ||||
JP2001267636A |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Tomohiro Minamiyama
Masaya Nishiyama
Jun Tsuruta
Tetsuro Shimada
Tomohiro Minamiyama
Masaya Nishiyama
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