配線形成方法 - Ebara Corporation

Title:

配線形成方法

Document Type and Number:

Japanese Patent JP4346593

Kind Code:

B2

Inventors:

Hiroaki Inoue
Okuyama Shuichi
Makoto Kanayama
Matsumoto Moriji

Application Number:

JP2005272776A

Publication Date:

October 21, 2009

Filing Date:

September 20, 2005

Export Citation:

Assignee:

Ebara Corporation
Ebara Yuji Light Co., Ltd.

International Classes:

H01L21/288; C23C18/16; C25D5/10; C25D5/18; C25D7/12; H01L21/3205

Domestic Patent References:

Attorney, Agent or Firm:

Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori

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