Title:
洗浄処理装置
Document Type and Number:
Japanese Patent JP4347426
Kind Code:
B2
Inventors:
Sadaaki Kurokawa
Application Number:
JP25465196A
Publication Date:
October 21, 2009
Filing Date:
September 26, 1996
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B08B3/08; H01L21/304; B01D19/00; C02F1/20
Domestic Patent References:
| JP312283A | ||||
| JP648630A | ||||
| JP63236581A | ||||
| JP21294U |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto