Title:
欠陥布片検出装置における欠陥レベル情報設定方法
Document Type and Number:
Japanese Patent JP4355479
Kind Code:
B2
More Like This:
Inventors:
Yoshikawa Kagawa
Application Number:
JP2002257683A
Publication Date:
November 04, 2009
Filing Date:
September 03, 2002
Export Citation:
Assignee:
Plex Co., Ltd.
International Classes:
G01B11/30; G01N21/898; D06H3/08
Domestic Patent References:
| JP8117499A | ||||
| JP8276100A | ||||
| JP9145633A | ||||
| JP2000097882A | ||||
| JP4007100U |
Foreign References:
| WO2001041068A1 |
Attorney, Agent or Firm:
Hiroshi Ohama