To provide a charged particle beam device and the like changeable to arbitrary magnification without obtaining actual images of all magnifications.

This charged particle beam device is provided with: a discrete magnification image acquisition part for imaging a discrete magnification image with a plurality of magnifications different from one another by using a magnification in imaging set by an observation condition setting part as a reference in imaging an observation image with a charged particle beam imaging part and for storing it; a display part for displaying the observation image; a magnification setting part for adjusting the display magnification of the observation image displayed on the display part; and a supplement processing part for generating a supplemented observation image displayed at the magnification set by the magnification setting part by computation based on the discrete magnification image previously imaged by the discrete magnification image acquisition part for the same observation image when the observation image at the display magnification set by the magnification setting part is not stored and for displaying the supplemented observation image.

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