Title:
真空供給継手
Document Type and Number:
Japanese Patent JP4357481
Kind Code:
B2
Abstract:
A rotating table provided with a determined gap Db and serving as a rotating body is rotatably mounted on a fixed base. Seal-member accommodating spaces serving as annular grooves are partitioned and formed in a fixed surface. Annular seal members are disposed in the seal-member accommodating spaces. When a vacuum is supplied to a communication passage, the absorbed seal members contact with the fixed surface and a rotated surface to seal gaps therebetween. When a positive pressure is supplied to the communication passage, the seal members are relocated in the seal-member accommodating spaces. The seal-member accommodating space has a taper portion, thereby preventing the seal members from biting. While the rotating table is being rotatably driven, no vacuum is supplied to the communication passage.
Inventors:
Teruhiko Fujiwara
Application Number:
JP2005504967A
Publication Date:
November 04, 2009
Filing Date:
February 10, 2004
Export Citation:
Assignee:
Koganei Co., Ltd.
International Classes:
F16J15/06; H01L21/00
Domestic Patent References:
| JP9253951A | ||||
| JP6240561A |
Attorney, Agent or Firm:
Yamato Tsutsui
Yoshitaka Kozuka
Yoshitaka Kozuka