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Patent Searching and Data


Title:
熱処理装置の温度校正方法
Document Type and Number:
Japanese Patent JP4357715
Kind Code:
B2
Inventors:
王 文凌
坂本 浩一
鈴木 富士雄
横田 隆
Application Number:
JP2000222233A
Publication Date:
November 04, 2009
Filing Date:
July 24, 2000
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
G01J5/02; H01L21/205; C23C16/46; C23C16/52; F27B5/06; F27D19/00; G01J5/00; G01J5/10; G01K15/00
Domestic Patent References:
JP2156632A
JP7058015A
JP11329979A
JP2000040663A
Attorney, Agent or Firm:
須山 佐一