Title:
搬送ロボット
Document Type and Number:
Japanese Patent JP4364001
Kind Code:
B2
Inventors:
Hirotaka Ogawa
Takeyuki Matsuzaki
Takeyuki Matsuzaki
Application Number:
JP2004030906A
Publication Date:
November 11, 2009
Filing Date:
February 06, 2004
Export Citation:
Assignee:
Daihen Co., Ltd.
International Classes:
B25J15/08; H01L21/677; B25J19/00; B65G49/06; H01L21/68
Domestic Patent References:
| JP2000133692A | ||||
| JP11121580A | ||||
| JP7193114A | ||||
| JP2000243809A | ||||
| JP2000277587A |
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tsukasa Senba
Takashi Shiotani
Hiroshi Furusawa
Masato Tsutsui
Tatsuya Tanaka
Tsukasa Senba
Takashi Shiotani
Hiroshi Furusawa
Masato Tsutsui