Title:
溶射部材、電極、およびプラズマ処理装置
Document Type and Number:
Japanese Patent JP4364667
Kind Code:
B2
Abstract:
A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic material and the thermally sprayed film for increasing a bonding force therebetween, wherein the thermally sprayed film side of the member is exposed to a high frequency plasma atmosphere and the electrode is intended to form a high frequency plasma on the side of the thermally sprayed film. The basic material includes a base portion made of a conductive material and a dielectric portion provided to include a part of a surface of the basic material. Further, the intermediate layer is comprised of a plurality of island-shaped parts isolated from each other.
Inventors:
Daisuke Hayashi
Application Number:
JP2004037094A
Publication Date:
November 18, 2009
Filing Date:
February 13, 2004
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; H05H1/46; B08B7/00; B22D19/00; C23C4/02; C23C4/10; C23C4/12; C23C28/02; C23C28/04; C23F1/00; H01J37/32; H01L21/304; H01L21/00
Domestic Patent References:
| JP10154596A | ||||
| JP9069554A | ||||
| JP8311633A | ||||
| JP2005120451A |
Attorney, Agent or Firm:
Hiroshi Takayama