Title:
スリットコート式塗布方法
Document Type and Number:
Japanese Patent JP4366581
Kind Code:
B2
Inventors:
Shinya Momose
Takayuki Suzuki
Takayuki Suzuki
Application Number:
JP2003434508A
Publication Date:
November 18, 2009
Filing Date:
December 26, 2003
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B05D1/26; G03F7/16; B05C5/02; B05D1/32; H01L21/027; B05C13/00
Domestic Patent References:
| JP2002009424A | ||||
| JP63146265A | ||||
| JP50058138A | ||||
| JP5198918A | ||||
| JP64011573U |
Attorney, Agent or Firm:
Hiroyuki Kurihara