Title:
電子線一括露光用マスクおよびそのマスクホルダー
Document Type and Number:
Japanese Patent JP4366736
Kind Code:
B2
Inventors:
Dotsubashi Hidenori
Application Number:
JP31931498A
Publication Date:
November 18, 2009
Filing Date:
November 10, 1998
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L21/027; G03F1/20; G03F1/66; G03F7/20
Domestic Patent References:
| JP7312194A | ||||
| JP58014837A | ||||
| JP61222129A | ||||
| JP54124682A | ||||
| JP11329931A | ||||
| JP10242033A |