Title:
プラズマ発生装置およびこれを用いた成膜方法並びに成膜装置
Document Type and Number:
Japanese Patent JP4368417
Kind Code:
B2
Abstract:
The cross section of a beam is flattened by causing a plasma beam (25) extracted by a convergence coil from a plasma gun to pass through the magnetic field that extends to the direction orthogonal to the direction in which the plasma beam travels and is formed by magnets (27) made of permanent magnets which are oppositely arranged in pairs in parallel with each other. A plasma apparatus is provided using a plasma beam with 0.7<=Wi/Wt with a half-value of beam intensity with respect to a width Wt of a flattened beam 28 as Wi. At least one magnet is included which is stronger in intensity of a repulsive magnetic field at the center of the beam.
Inventors:
Nakagawara Hitoshi
Application Number:
JP2009512858A
Publication Date:
November 18, 2009
Filing Date:
April 24, 2007
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
C23C14/24
Domestic Patent References:
| JP59027499A | ||||
| JP63040300A | ||||
| JP2185966A | ||||
| JP4268073A | ||||
| JP6349593A | ||||
| JP9078230A |
Foreign References:
| WO2007049454A1 |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Okabe
Shinichi Usui
Takao Ochi
Asahi Shinmitsu
Katsumi Miyama
Nobuaki Kato
Okabe
Shinichi Usui
Takao Ochi
Asahi Shinmitsu
Katsumi Miyama