Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4380116
Kind Code:
B2
Inventors:
Atsuo Hirabayashi
Application Number:
JP2002198184A
Publication Date:
December 09, 2009
Filing Date:
July 08, 2002
Export Citation:
Assignee:
Fuji Electric Device Technology Co., Ltd.
International Classes:
H01L21/76; H01L21/762; H01L21/02; H01L27/08; H01L27/12
Domestic Patent References:
| JP7153835A | ||||
| JP9008126A | ||||
| JP5243370A | ||||
| JP2001144174A | ||||
| JP10173041A | ||||
| JP9045882A | ||||
| JP3250617A | ||||
| JP2000294623A | ||||
| JP2002076113A | ||||
| JP11097522A | ||||
| JP5175325A |
Attorney, Agent or Firm:
Yoichi Matsumoto