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Patent Searching and Data


Title:
載置台及び熱処理装置
Document Type and Number:
Japanese Patent JP4380236
Kind Code:
B2
Inventors:
荒見 淳一
Application Number:
JP2003178690A
Publication Date:
December 09, 2009
Filing Date:
June 23, 2003
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/324; H05B3/84; C23C16/46; F27B5/04; F27B5/14; F27B17/00; H01L21/00; H01L21/02; H01L21/22; H01L21/31; H05B3/14
Domestic Patent References:
JP2000021890A
JP2001208478A
JP5021438U
JP2001332373A
JP63216283A
JP7022500A
Attorney, Agent or Firm:
浅井 章弘