Title:
微小物体検査装置
Document Type and Number:
Japanese Patent JP4382938
Kind Code:
B2
Inventors:
Kamata Yoshihiko
Application Number:
JP35142999A
Publication Date:
December 16, 2009
Filing Date:
December 10, 1999
Export Citation:
Assignee:
Hugh Brain Co., Ltd.
International Classes:
G01B11/02; G01B11/30
Domestic Patent References:
| JP8086757A | ||||
| JP4107000A | ||||
| JP48102656A |
Attorney, Agent or Firm:
Tetsuya Mizogami