Title:
真空気化装置
Document Type and Number:
Japanese Patent JP4384866
Kind Code:
B2
Abstract:
The invention concerns a device and a process for applying a lubricant by means of vapour deposition to a target object, especially a magnetic data carrier. The device in accordance with the invention comprises a lubricant supply means ( 1 ) that can be filled from outside, possibly by means of a feed line. The produced lubricant vapour ( 5 ) is expanded through one or more exit openings ( 6 ) in the direction of a target object ( 8 ) on which the vapour deposition is to be effected. The vapour at first becomes adsorbed on the walls of a cone-shaped distribution element ( 4 ) situated between the lubricant supply means ( 1 ) and the target object ( 8 ), from which it subsequently desorbs again. Said adsorption/desorption process assures an even and homogeneous vapour distribution over the target object ( 8 ). A device for interrupting the vapour supply makes it possible for the device to be operated in a discontinuous manner.
Inventors:
Coat, vane heart
Application Number:
JP2003072406A
Publication Date:
December 16, 2009
Filing Date:
March 17, 2003
Export Citation:
Assignee:
INTEVAC INCORPORATED
International Classes:
C23C14/24; B05D5/08; B05D7/24; G11B5/725; G11B5/84
Domestic Patent References:
| JP2001351226A | ||||
| JP2001510856A | ||||
| JP2001220286A |
Attorney, Agent or Firm:
Yuichi Yamada
Masakazu Noda
Ikeda adult
Masakazu Noda
Ikeda adult