微細構造物の製造方法 - Seiko Epson Corporation

Title:

微細構造物の製造方法

Document Type and Number:

Japanese Patent JP4385584

Kind Code:

B2

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Inventors:

▲高▼木憲一
Tomohiko Togawa
Yuji Saito

Application Number:

JP2002294879A

Publication Date:

December 16, 2009

Filing Date:

October 08, 2002

Export Citation:

Assignee:

Seiko Epson Corporation

International Classes:

G02B5/20; G02F1/1335

Domestic Patent References:

JP11329741A

Attorney, Agent or Firm:

Masahiko Ueyanagi
Osamu Suzawa

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