Title:
圧力センサ
Document Type and Number:
Japanese Patent JP4389326
Kind Code:
B2
Abstract:
A pressure sensor has two sensor elements respectively disposed in different pressure spaces A and B. Each of the sensor elements has a semiconductor substrate having a pressure reference chamber therein, a diaphragm formed as a wall defining the pressure reference chamber, and gauges for converting deformation of the diaphragm into an electric signal. The two sensor elements overlap with each other at sides opposite to the respective diaphragms, and close a hole formed in a partition member partitioning the two pressure spaces A and B. A differential pressure between the pressure spaces A and B is detected as a relative pressure by a difference between outputs from the two sensor elements.
Inventors:
Toyota Inao
Yasutoshi Suzuki
Yasutoshi Suzuki
Application Number:
JP2000071055A
Publication Date:
December 24, 2009
Filing Date:
March 09, 2000
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01L13/06; G01L9/00; G01L15/00; H01L29/84
Domestic Patent References:
| JP10132692A | ||||
| JP63101712A | ||||
| JP5142076A | ||||
| JP61239135A | ||||
| JP64043738A | ||||
| JP5118890A | ||||
| JP54059186A |
Foreign References:
| US5672832 |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Fumihiro Mizuno
Takahiro Miura
Fumihiro Mizuno