Title:
被処理体の搬送機構及び処理システム
Document Type and Number:
Japanese Patent JP4389424
Kind Code:
B2
Abstract:
A main carrying device forming a part of a processing system, comprising a casing (40) forming a main carrying chamber (44) having vacuum atmosphere, the casing (40) further comprising a plurality of transfer ports (52A, 52B) for transferring the processed body (W) between the carrying chamber 44 and the outside, a mobile body (58) is slidably installed on a guide rail (48) horizontally installed in the carrying chamber (44), a linear motor mechanism (54, 62) for moving the mobile body (58) along the guide rail (48) is installed, a holding body (64) for holding the processed body (W) is liftably connected to the mobile body (58) through a support member (66), and a lifting mechanism (74) for lifting the support member (66) relative to the mobile body (58) is installed in the casing (40) at a position corresponding to the transfer ports (52A, 52B).
Inventors:
Shigeru Ishizawa
Hiroaki Saeki
Hiroaki Saeki
Application Number:
JP2001392702A
Publication Date:
December 24, 2009
Filing Date:
December 25, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B65G49/00; H01L21/677; B65G49/07; H01L21/00
Domestic Patent References:
| JP7108159A | ||||
| JP6179524A | ||||
| JP2000323548A | ||||
| JP6100164A |
Attorney, Agent or Firm:
Akihiro Asai