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Patent Searching and Data


Title:
結晶製造方法
Document Type and Number:
Japanese Patent JP4390797
Kind Code:
B2
Inventors:
Yuzo Tsuda
Shigeru Ito
Yano Morinori
Application Number:
JP2006300554A
Publication Date:
December 24, 2009
Filing Date:
November 06, 2006
Export Citation:
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Assignee:
Sharp Corporation
International Classes:
H01L21/205; C23C16/34; H01S5/343
Domestic Patent References:
JP10326912A
JP11126948A
JP10312971A
JP10321529A
JP11135770A
Foreign References:
WO1997011518A1
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai