Title:
結晶製造方法
Document Type and Number:
Japanese Patent JP4390797
Kind Code:
B2
Inventors:
Yuzo Tsuda
Shigeru Ito
Yano Morinori
Shigeru Ito
Yano Morinori
Application Number:
JP2006300554A
Publication Date:
December 24, 2009
Filing Date:
November 06, 2006
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01L21/205; C23C16/34; H01S5/343
Domestic Patent References:
JP10326912A | ||||
JP11126948A | ||||
JP10312971A | ||||
JP10321529A | ||||
JP11135770A |
Foreign References:
WO1997011518A1 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai